US 12,040,217 B2
Substrate lift mechanism and reactor including same
Eric Hill, Goodyear, AZ (US); and John DiSanto, Scottsdale, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Jan. 24, 2023, as Appl. No. 18/100,660.
Application 16/944,271 is a division of application No. 15/672,096, filed on Aug. 8, 2017, granted, now 10,770,336.
Application 18/100,660 is a continuation of application No. 16/944,271, filed on Jul. 31, 2020, granted, now 11,587,821.
Prior Publication US 2023/0163019 A1, May 25, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/687 (2006.01); C23C 16/458 (2006.01); C30B 25/08 (2006.01); C30B 25/12 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/68742 (2013.01) [C23C 16/4581 (2013.01); C23C 16/4584 (2013.01); C23C 16/4586 (2013.01); C30B 25/08 (2013.01); C30B 25/12 (2013.01); H01L 21/67028 (2013.01); H01L 21/67069 (2013.01); H01L 21/67248 (2013.01); H01L 21/68792 (2013.01); H01L 21/67126 (2013.01); H01L 21/68757 (2013.01)] 20 Claims
OG exemplary drawing
 
15. A substrate support assembly comprising:
a susceptor;
a susceptor support coupled to the susceptor;
a rotatable shaft coupled to the susceptor support;
a lift pin support member;
one or more lift pins coupled to the lift pin support member;
a moveable shaft coupled to the lift pin support member;
a lift pin mechanism to cause the moveable shaft to move in a vertical direction during a substrate transfer process; and
a susceptor rotation mechanism that causes the susceptor to rotate during substrate processing,
wherein the susceptor support comprises a plurality of susceptor support arms and one or more susceptor support structures coupled to or integrated with each of the plurality of susceptor support arms, and
wherein the susceptor retains at least one lift pin at a location radially exterior to a susceptor support structure of the one or more susceptor support structures.