US 12,038,356 B2
Vacuum transfer for nano indenter and sample measurement method using the same
So Hee Kim, Seoul (KR); Jihyun Hong, Seoul (KR); Jae Pyoung Ahn, Seoul (KR); Inyeong Kang, Seoul (KR); and Woo Suk Baek, Seoul (KR)
Assigned to KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY, Seoul (KR)
Filed by KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY, Seoul (KR)
Filed on May 21, 2021, as Appl. No. 17/326,337.
Claims priority of application No. 10-2020-0101573 (KR), filed on Aug. 13, 2020.
Prior Publication US 2022/0050026 A1, Feb. 17, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01N 1/00 (2006.01); G01N 1/28 (2006.01); G01N 35/00 (2006.01)
CPC G01N 1/286 (2013.01) [G01N 35/00029 (2013.01); G01N 2035/00059 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A vacuum transfer system installed in an microscope to prevent oxidation of a sample, the vacuum transfer system comprising:
a housing having an open surface, wherein the surface comprises a coupling element for attaching or detaching to/from the microscope, and an inside of the housing is kept closed from outside as the housing is coupled with the microscope through the coupling element;
a gas inlet through which an inert gas is introduced into the housing;
a gas outlet through which an active gas in the housing exits with the introduction of the inert gas into the housing; and
at least one glove formed to be connected with the inside of the housing.