US 12,036,514 B2
Pillar template for making micropore membranes and methods of fabrication thereof
Douglas Albagli, Marlborough, MA (US); William A Hennessy, Marlborough, MA (US); Samrat Chawda, Loudonville, NY (US); and Robert Gallup, Wilton, NY (US)
Assigned to GLOBAL LIFE SCIENCES SOLUTIONS USA, LLC, Marlborough, MA (US)
Filed by Global Life Sciences Solutions USA LLC, Marlborough, MA (US)
Filed on Mar. 31, 2021, as Appl. No. 17/219,713.
Prior Publication US 2022/0314173 A1, Oct. 6, 2022
Int. Cl. B01D 67/00 (2006.01); B01D 61/14 (2006.01); G03F 7/00 (2006.01); G03F 7/11 (2006.01)
CPC B01D 67/0034 (2013.01) [B01D 61/147 (2013.01); G03F 7/0015 (2013.01); G03F 7/11 (2013.01); B01D 2323/24 (2013.01); B01D 2323/42 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A pillar template for making a porous membrane comprising:
a glass substrate; and
a plurality of pillars projecting from the substrate at a first height and having a lateral dimension, the pillars comprising silicon or silicon nitride and corresponding to a pore region of the porous membrane and having a substantially vertical profile;
wherein the first height is in the range of 0.5 to 5 microns and the lateral dimension is in the range of 1 to 5 microns.