US 12,364,020 B2
Diode with reduced current leakage
Hsin Fu Lin, Hsinchu County (TW); Shiang-Hung Huang, New Taipei (TW); and Tsung-Hao Yeh, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Feb. 9, 2022, as Appl. No. 17/667,858.
Claims priority of provisional application 63/216,163, filed on Jun. 29, 2021.
Prior Publication US 2022/0415879 A1, Dec. 29, 2022
Int. Cl. H10D 89/60 (2025.01); H10D 8/00 (2025.01); H10D 8/01 (2025.01); H10D 62/10 (2025.01)
CPC H10D 89/611 (2025.01) [H10D 8/043 (2025.01); H10D 8/411 (2025.01); H10D 62/126 (2025.01)] 20 Claims
OG exemplary drawing
 
1. A method for forming an integrated chip, the method comprising:
forming an isolation structure within a semiconductor substrate;
forming a gate structure over the semiconductor substrate, wherein the gate structure comprises a gate electrode overlying a gate dielectric layer, wherein a thickness of the gate dielectric layer is about 140 Angstroms or greater;
forming a well region within the semiconductor substrate, wherein the well region has a first doping type and is formed through an opening defined by sidewalls of the gate structure;
forming a first contact region within the well region, wherein the first contact region is formed through the opening and comprises a second doping type opposite the first doping type; and
forming a second contact region and a third contact region on opposite sides of the gate electrode, wherein the second and third contact regions respectively comprise the first doping type.