US 12,364,010 B2
Mask assembly and method for manufacturing the same
Jeongkuk Kim, Suwon-si (KR); Hwi Kim, Suwon-si (KR); Youngmin Moon, Yongin-si (KR); Seungyong Song, Suwon-si (KR); Areum Lee, Suwon-si (KR); Eunbee Jo, Hwaseong-si (KR); and Kyu Hwan Hwang, Seongnam-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Sep. 21, 2022, as Appl. No. 17/949,346.
Claims priority of application No. 10-2021-0157182 (KR), filed on Nov. 16, 2021.
Prior Publication US 2023/0154941 A1, May 18, 2023
Int. Cl. H10D 86/01 (2025.01); H10K 71/16 (2023.01); H10K 71/20 (2023.01); C23C 14/04 (2006.01); C25D 1/10 (2006.01)
CPC H10D 86/0231 (2025.01) [H10K 71/166 (2023.02); H10K 71/20 (2023.02); C23C 14/042 (2013.01); C25D 1/10 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A mask assembly comprising:
a frame including a frame opening; and
a mask disposed on the frame and including:
a body portion including:
an upper surface and a lower surface opposing each other;
deposition openings spaced apart from each other;
protrusions protruding from the upper surface and surrounding the corresponding deposition opening; and
at least one step formation pattern overlapping the protrusions in a plan view and disposed in the body portion.