US 12,363,485 B2
Full-frequency band high quality MEMS microphone with a bar and sound tunnels
Haiou Jin, Suzhou (CN); Nianbo Wu, Suzhou (CN); Xinxi He, Suzhou (CN); Xinzhi Zhu, Suzhou (CN); Biying Li, Suzhou (CN); and Ping Yang, Suzhou (CN)
Assigned to SUZHOU LI YUE MUSICAL INSTRUMENTS CO., LTD., Suzhou (CN)
Appl. No. 18/026,223
Filed by SUZHOU LI YUE MUSICAL INSTRUMENTS CO., LTD., Jiangsu (CN)
PCT Filed Dec. 16, 2020, PCT No. PCT/CN2020/136855
§ 371(c)(1), (2) Date Mar. 29, 2023,
PCT Pub. No. WO2022/036961, PCT Pub. Date Feb. 24, 2022.
Claims priority of application No. 202010838771.3 (CN), filed on Aug. 19, 2020.
Prior Publication US 2023/0336923 A1, Oct. 19, 2023
Int. Cl. H04R 19/04 (2006.01); H04R 7/12 (2006.01)
CPC H04R 19/04 (2013.01) [H04R 7/12 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A full-frequency band high quality MEMS microphone with a bar and sound tunnels, wherein:
it comprises a sensor, an acoustic chamber, and a circuit board; the sensor is located in the acoustic chamber and the sensor comprises a diaphragm and a silicon back plate;
wherein, the diaphragm is provided with a bar assembly the bar assembly is fixed on at least one side of the surface of the diaphragm and defines the center of the diaphragm into a central area;
the bar assembly comprises a plurality of arc-shaped bar members, each of which is arranged in a ring around the center of the horizontal direction of the diaphragm;
a gap is formed between two adjacent arc-shaped bar members;
the diaphragm is also provided with an annular area and at least two radial grooves on the same surface with the bar assembly; the annular area is arranged around the central area and is located between the bar assembly and the central area;
the radial grooves are arranged radially and uniformly based on the center of the diaphragm in the horizontal direction, and then the surface of the diaphragm located outside the bar assembly is divided into multiple resonance regions;
the radial grooves and the gaps between the two arc-shaped bar members are matched one by one; the radial groove is penetrated in the gap and the inner end of each radial groove is connected with the annular area; and
wherein, the radial groove is concave on the surface of the diaphragm to form a sound tunnel.