| CPC H01L 21/76802 (2013.01) [H01L 21/56 (2013.01); H01L 23/31 (2013.01); H01L 23/5384 (2013.01); H01L 23/5386 (2013.01); H01L 2021/60022 (2013.01)] | 20 Claims |

|
1. A package comprising:
a core substrate electrically connected to respective first sides of interconnect structures of a plurality of interconnect structures, wherein each interconnect structure of the plurality of interconnect structures is at least partially surrounded by an encapsulant, wherein each interconnect structure of the plurality of interconnect structures respectively comprises:
a redistribution structure;
a through via on the redistribution structure;
a molding material on the redistribution structure; and
an integrated device over the redistribution structure, wherein the molding material separates the integrated device from the redistribution structure; and
a plurality of semiconductor devices electrically connected to respective second sides of the interconnect structures of the plurality of interconnect structures, wherein the second side is opposite the first side.
|