US 12,362,153 B2
Pedestal setup using camera wafer
Prasanna Kulkarni, Tigard, OR (US); Rachel E. Batzer, Tigard, OR (US); Ted Tan, West Linn, OR (US); Vivekanandan Krishnaswamy, Bangalore (IN); Boonyarit Woonprasert, Tigard, OR (US); and Shawn Fiedler, Tigard, OR (US)
Assigned to LAM RESEARCH CORPORATION, Fremont, CA (US)
Appl. No. 17/630,218
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Jul. 24, 2020, PCT No. PCT/US2020/043414
§ 371(c)(1), (2) Date Jan. 26, 2022,
PCT Pub. No. WO2021/021604, PCT Pub. Date Feb. 4, 2021.
Claims priority of provisional application 62/879,654, filed on Jul. 29, 2019.
Prior Publication US 2022/0282380 A1, Sep. 8, 2022
Int. Cl. H01L 21/67 (2006.01); H01J 37/32 (2006.01); H01L 21/68 (2006.01)
CPC H01J 37/32623 (2013.01) [H01J 37/32642 (2013.01); H01J 37/32715 (2013.01); H01L 21/681 (2013.01); H01J 37/32633 (2013.01)] 10 Claims
OG exemplary drawing
 
1. An apparatus comprising:
an annular member arranged along a first plane;
N first members extending from an outer diameter of the annular member perpendicularly to the first plane, where N is an integer greater than two, wherein a first portion of each of the N first members extends above the first plane, and wherein a second portion of each of the N first members extends below the first plane; and
N second members extending radially outward from the second portions of the N first members along a second plane that is parallel to the first plane, wherein each of the N second members lies between a different pair of the N first members.