US 12,362,135 B2
Method and system for automatic zone axis alignment
John J. Flanagan, Hillsboro, OR (US); Nathaniel Kurtz, Hillsboro, OR (US); Ashley Tilson, Hillsboro, OR (US); and Phillip Parker, Hillsboro, OR (US)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Nov. 18, 2021, as Appl. No. 17/530,288.
Application 17/530,288 is a continuation of application No. 16/730,998, filed on Dec. 30, 2019, granted, now 11,211,222.
Prior Publication US 2022/0076917 A1, Mar. 10, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/244 (2006.01); G01N 23/20058 (2018.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/244 (2013.01) [G01N 23/20058 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); H01J 2237/1501 (2013.01); H01J 2237/2823 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
directing a charged particle beam towards a sample;
acquiring a diffraction pattern of the sample;
using a trained network, segmenting the diffraction pattern and generating a segmented area of the diffraction pattern corresponding to a Laue circle; and
determining a zone axis tilt based on the segmented area.