CPC H01J 35/12 (2013.01) [H01J 35/112 (2019.05)] | 20 Claims |
1. A system, comprising:
a vacuum enclosure;
an anode support structure penetrating the vacuum enclosure and including a plurality of first cooling passages; and
an anode disposed within the vacuum enclosure, coupled to and supported by the anode support structure, and including:
a target; and
a plurality of second cooling passages;
wherein:
each of the second cooling passages is coupled to a corresponding first cooling passage;
the anode is coupled to the anode support structure on a side of the anode different from a side of the anode including the target and different from axial ends of the anode on a major axis of the anode; and
the anode is a linear anode.
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