US 12,361,526 B2
Reconstruction of a distorted image of an array of structural elements of a specimen
Yehuda Cohen, Moshav Timorim (IL); and Rafael Bistritzer, Petach Tikva (IL)
Assigned to Applied Materials Israel Ltd., Rehovot (IL)
Filed by Applied Materials Israel Ltd., Rehovot (IL)
Filed on Sep. 12, 2023, as Appl. No. 18/367,001.
Application 18/367,001 is a continuation of application No. 16/922,972, filed on Jul. 7, 2020, granted, now 11,798,138.
Prior Publication US 2023/0419456 A1, Dec. 28, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G06K 9/00 (2022.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01); G06T 3/10 (2024.01); G06T 3/18 (2024.01); G06T 5/73 (2024.01); G06T 5/80 (2024.01); G06T 7/00 (2017.01); G06T 7/70 (2017.01); G06V 10/22 (2022.01); G06V 10/24 (2022.01); H04N 1/387 (2006.01)
CPC G06T 5/73 (2024.01) [G01N 21/8851 (2013.01); G01N 21/9501 (2013.01); G06T 3/10 (2024.01); G06T 3/18 (2024.01); G06T 5/80 (2024.01); G06T 7/0004 (2013.01); G06T 7/70 (2017.01); G06V 10/22 (2022.01); G06V 10/243 (2022.01); G06V 10/247 (2022.01); H04N 1/387 (2013.01); G06T 2207/30148 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system, comprising:
a memory device; and
a processing device, operatively coupled to the memory device, the processing device to:
receive a warped image of an array of cells of a specimen, wherein cell of the array of cells comprises one or more structural elements of a substrate;
segment each cell of the array of cells into a respective plurality of sub-cells, wherein a size of one or more of the respective plurality of sub-cells is determined using a recipe and wherein the one or more of the respective plurality of sub-cells comprises distinguishable information;
generate a set of reference images of a set of regions associated with a set of sub-cells from one or more of the respective plurality of sub-cells;
identify a first cell of the array of cells using a reference image of the set of reference images and at least part of the warped image;
select a first sub-cell from a plurality of sub-cells of the first cell;
identify one or more locations comprising sub-cells that differ from the first sub-cell;
determine, based at least on the one or more locations, a warped compensation transform; and
apply the warped compensation transform on the warped image to generate an undistorted image.