US 12,360,147 B2
Device that includes a MEMS tunable filter and a method for operating the device
Peleg Levin, Rishon Le-Zion (IL); Eliahu Chaim Ashkenazi, Jerusalem (IL); and Ariel Raz, Kfar Vradim (IL)
Assigned to Unispectral Ltd., Ramat Gan (IL)
Appl. No. 17/431,682
Filed by Unispectral Ltd., Ramat Gan (IL)
PCT Filed Feb. 17, 2020, PCT No. PCT/IL2020/050175
§ 371(c)(1), (2) Date Aug. 17, 2021,
PCT Pub. No. WO2020/170241, PCT Pub. Date Aug. 27, 2020.
Claims priority of provisional application 62/806,960, filed on Feb. 18, 2019.
Prior Publication US 2022/0155581 A1, May 19, 2022
Int. Cl. G01R 27/26 (2006.01); G01B 7/00 (2006.01); G01B 7/06 (2006.01); G01R 31/00 (2006.01); G01R 31/28 (2006.01); G02B 26/00 (2006.01)
CPC G01R 27/2605 (2013.01) [G01B 7/00 (2013.01); G01B 7/08 (2013.01); G01R 31/00 (2013.01); G01R 31/2829 (2013.01); G02B 26/001 (2013.01); G02B 26/007 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A system for monitoring a state of a tunable filter that comprises a first and second optical members, at least the first member is movable with respect to the second member upon application of voltage difference between first actuation regions thereon and respective second actuation regions on the second member, the system comprising:
a processing circuitry configured to (i) operate one or more voltage sources for applying a selected profile of a voltage signal to at least one of said first or second actuation regions, said selected profile comprises at least a first component for resulting a movement of the movable member and a second component configured for being varied in response for a given state of the tunable filter and (ii) to analyze a resultant signal of said voltage signal and determine a variation profile of the resultant signal from the provided voltage signal, said variation profile is being indicative of the state of the tunable filter;
the system further comprising a dissipation element electrically connected to at least one of the first or second actuation regions such that upon oscillation of the first member, energy is dissipated therethrough to obtain a quality factor of the first member lower than 1000.