US 12,360,055 B2
Inspection system and inspection method using the same
Sungwoo Jung, Cheonan-si (KR); Hyeonsuk Guak, Suwon-si (KR); and Jaewoo Jung, Gwangmyeong-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-do (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Feb. 9, 2023, as Appl. No. 18/107,648.
Claims priority of application No. 10-2022-0078141 (KR), filed on Jun. 27, 2022; and application No. 10-2022-0102220 (KR), filed on Aug. 16, 2022.
Prior Publication US 2023/0417681 A1, Dec. 28, 2023
Int. Cl. G01N 21/95 (2006.01); G01N 21/55 (2014.01); G01N 21/88 (2006.01)
CPC G01N 21/95 (2013.01) [G01N 21/55 (2013.01); G01N 21/8806 (2013.01); G01N 2201/0633 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An inspection system comprising:
a single light source part which irradiates an incident light to an inspection object;
a main lens through which reflected light passes, wherein the reflected light is light reflected from the inspection object and includes a first polarization component and a second polarization component;
a beam splitter which splits the reflected light passing through the main lens into a first split light and a second split light;
a first polarizer including a first filter area which selectively passes the first polarization component therethrough;
a second polarizer including a second filter area which selectively passes the second polarization component therethrough; and
an image sensor which generates a first captured image for the first polarization component and a second captured image for the second polarization component,
wherein the first polarization component is obtained by reflecting the incident light from an outer surface of the inspection object, and
the second polarization component is obtained by reflecting the incident light from an inner boundary surface of the inspection object.