US 12,359,982 B2
Mounting table, inspection device, and temperature calibration method
Yoshihito Yamasaki, Singapore (SG); and Jun Mochizuki, Nirasaki (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Appl. No. 17/616,101
Filed by TOKYO ELECTRON LIMITED, Tokyo (JP)
PCT Filed May 23, 2020, PCT No. PCT/JP2020/020432
§ 371(c)(1), (2) Date Dec. 2, 2021,
PCT Pub. No. WO2020/246279, PCT Pub. Date Dec. 10, 2020.
Claims priority of application No. 2019-105507 (JP), filed on Jun. 5, 2019.
Prior Publication US 2022/0316953 A1, Oct. 6, 2022
Int. Cl. G01K 1/14 (2021.01); G01K 15/00 (2006.01)
CPC G01K 1/14 (2013.01) [G01K 15/005 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A mounting table on which a substrate to be inspected is mounted, comprising:
a plurality of temperature sensors, each configured to measure a temperature of a corresponding one of a plurality of spots on the mounting table;
electrode pads, each connected to a corresponding one of the plurality of temperature sensors and installed on a mounting surface, and
a control temperature sensor used for controlling the temperature of the mounting table,
wherein the electrode pads are installed so as to be contacted with probes of a probe card,
signals of temperatures measured by the plurality of temperature sensors are readable through the probe card,
the control temperature sensor is calibrated based on the temperatures respectively measured by the plurality of temperature sensors, and
the plurality of temperature sensors are disposed inside the mounting table, respectively positioned below their corresponding electrode pads, and electrically connected to the corresponding electrode pads through through-holes formed between the temperature sensors and the corresponding electrode pads.