US 12,359,906 B2
Three-dimensional measurement device
Hiroyuki Ishigaki, Aichi (JP); Tomoru Okada, Aichi (JP); Ikuo Futamura, Aichi (JP); Takahiro Mamiya, Aichi (JP); and Yoshio Hayasaki, Tochigi (JP)
Assigned to CKD CORPORATION, Aichi (JP); and UTSUNOMIYA UNIVERSITY, Tochigi (JP)
Filed by CKD CORPORATION, Aichi (JP); and UTSUNOMIYA UNIVERSITY, Tochigi (JP)
Filed on Jul. 18, 2023, as Appl. No. 18/354,635.
Application 18/354,635 is a continuation of application No. PCT/JP2021/040805, filed on Nov. 5, 2021.
Claims priority of application No. 2021-028628 (JP), filed on Feb. 25, 2021.
Prior Publication US 2023/0366668 A1, Nov. 16, 2023
Int. Cl. G01B 9/02001 (2022.01); G01B 9/02015 (2022.01); G01B 9/02055 (2022.01); G01B 11/24 (2006.01)
CPC G01B 9/02007 (2013.01) [G01B 9/02015 (2013.01); G01B 9/02027 (2013.01); G01B 9/02081 (2013.01); G01B 11/2441 (2013.01); G01B 2290/45 (2013.01); G01B 2290/70 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A three-dimensional measurement device, comprising:
an optical system:
comprises an optical device that splits an incident light into two split lights,
irradiates a measurement object with a measurement light that is at least part of one of the two split lights,
irradiates a reference plane with a reference light that is at least part of another of the two split lights, and
combines at least part of the measurement light reflected by the measurement object with at least part of the reference light reflected by the reference plane to emit a combined light;
a first light emitter that emits a first light that has a first wavelength and enters a first input portion of the optical device, wherein
the measurement object is irradiated with a first measurement light and the reference plane is irradiated with a first reference light once the first light enters the first input portion;
a second light emitter that emits a second light that has a second wavelength and enters a second input portion of the optical device, wherein
the measurement object is irradiated with a second measurement light and the reference plane is irradiated with a second reference light once the second light enters the second input portion;
a first imaging device that takes an image of an output light that is output from a first output portion of the optical device once the first light enters the first input portion, and obtains first image data;
a second imaging device that takes an image of an output light that is output from a second output portion of the optical device once the second light enters the second input portion, and obtains second image data; and
a control device that executes three-dimensional measurement of the measurement object, based on the first and second image data obtained by the first imaging device and by the second imaging device, wherein
the optical device and the first and second light emitters are disposed such that:
a traveling direction of the first measurement light output from the optical device and directed to the measurement object is different from a traveling direction of the second measurement light output from the optical device and directed to the measurement object,
a traveling direction of the first reference light output from the optical device and directed to the reference plane is different from a traveling direction of the second reference light output from the optical device and directed to the reference plane,
a traveling direction of the first measurement light reflected by the measurement object and directed to the optical device is different from a traveling direction of the second measurement light reflected by the measurement object and directed to the optical device, and
a traveling direction of the first reference light reflected by the reference plane and directed to the optical device is different from a traveling direction of the second reference light reflected by the reference plane and directed to the optical device, wherein
the optical device is configured to:
combine part of the first measurement light reflected by the measurement object with part of the first reference light reflected by the reference plane to emit a combined light from the first output portion, and
combine part of the second measurement light reflected by the measurement object with part of the second reference light reflected by the reference plane to emit a combined light from the second output portion.