| CPC G01B 7/30 (2013.01) [G01D 5/16 (2013.01)] | 22 Claims |
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1. A method, comprising:
manufacturing a magnetic-field angle sensor comprising:
heating, to a first temperature, a substrate comprising:
heating a first magnetoresistance (MR) element comprising a first type of antiferromagnetic material having a first Néel temperature and a first magnetization direction;
heating a second MR element comprising a second type of antiferromagnetic material having a second Néel temperature and a second magnetization direction, wherein the first Néel temperature is greater than the second Néel temperature, wherein the first temperature is greater than the first Néel temperature;
after heating the substrate to the first temperature, applying a first magnetic field to the substrate in an x-direction to enable the first magnetization direction and the second magnetization direction to be in the x-direction;
cooling the substrate to a temperature less than the first Néel temperature while applying the first magnetic field;
enabling a temperature of the substrate to be a second temperature after ceasing to apply the first magnetic field, wherein the second temperature is less than the first Néel temperature and greater than the second Néel temperature; and
applying a second magnetic field to the substrate in a y-direction to enable the second magnetization direction to be in the y-direction,
wherein the heating, to the first temperature, further comprises heating a third MR element comprising a third type of antiferromagnetic material having a third Néel temperature and a third magnetization direction, wherein the second Néel temperature is greater than the third Néel temperature.
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