US 12,358,099 B2
Dressing ring
Yoshikazu Suzuki, Tokyo (JP); and Tomoharu Kihara, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Aug. 2, 2022, as Appl. No. 17/816,858.
Claims priority of application No. 2021-131019 (JP), filed on Aug. 11, 2021.
Prior Publication US 2023/0051072 A1, Feb. 16, 2023
Int. Cl. B24B 53/12 (2006.01)
CPC B24B 53/12 (2013.01) 12 Claims
OG exemplary drawing
 
1. A grinding method of a workpiece having a front surface and a back surface, comprising:
a dressing member holding step of holding a ring-shaped dressing member that has an upper surface and an opening and is for dressing a plurality of grinding stones of a grinding wheel, on a holding surface of a chuck table, the holding surface being capable of holding the workpiece thereon;
a workpiece holding step of holding the workpiece, with the front surface thereof directed downward, in the opening of the dressing member held on the holding surface such that the back surface of the workpiece is located higher than the upper surface of the dressing member;
a grinding step of grinding the workpiece by the grinding wheel that is rotating about an axis of rotation of a spindle; and
a dressing step of dressing the grinding stones with the dressing member by relatively moving the grinding wheel toward the holding surface while rotating the chuck table about a predetermined axis of rotation with the grinding wheel positioned above the dressing member and further outside of the workpiece in a radial direction of the holding surface.