US 12,035,451 B2
Method and system for liquid cooling isolated x-ray transmission target
Claus Flachenecker, Hayward, CA (US); Bruce Borchers, Scott's Valley, CA (US); and Thomas A. Case, Walnut Creek, CA (US)
Assigned to CARL ZEISS X-RAY MICROSCOPY INC., Dublin, CA (US)
Filed by Carl Zeiss X-ray Microscopy, Inc., Dublin, CA (US)
Filed on Apr. 23, 2021, as Appl. No. 17/238,799.
Prior Publication US 2022/0346212 A1, Oct. 27, 2022
Int. Cl. H05G 1/02 (2006.01); H01J 35/12 (2006.01); H01J 35/14 (2006.01)
CPC H05G 1/025 (2013.01) [H01J 35/13 (2019.05); H01J 35/14 (2013.01); H01J 2235/1204 (2013.01); H01J 2235/1216 (2013.01); H01J 2235/1262 (2013.01)] 24 Claims
OG exemplary drawing
 
1. An x-ray source comprising:
a target assembly including a transmission target at a distal side of the target assembly;
an electron source for generating electrons to impact the transmission target to generate x-rays from a distal side of the transmission target;
a high voltage generator for accelerating the electrons; and
a flight tube assembly separating the target assembly from the electron source and extending a vacuum to a proximal side of the transmission target, the flight tube assembly transporting a coolant to a proximal side of the target assembly.