US 12,034,433 B2
Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
Tetsuya Otsuki, Fujimi (JP); and Tsugio Ide, Minowa (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Oct. 18, 2022, as Appl. No. 17/967,927.
Application 17/967,927 is a continuation of application No. 16/839,125, filed on Apr. 3, 2020, granted, now 11,509,288.
Application 16/839,125 is a continuation of application No. 15/926,571, filed on Mar. 20, 2018, granted, now 10,651,819, issued on May 12, 2020.
Claims priority of application No. 2017-058706 (JP), filed on Mar. 24, 2017.
Prior Publication US 2023/0040197 A1, Feb. 9, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/215 (2006.01); B81B 3/00 (2006.01); B81B 7/00 (2006.01); G01C 19/56 (2012.01); G01C 19/5621 (2012.01); H03B 5/32 (2006.01); H03H 3/007 (2006.01); H03H 9/02 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01); H03H 9/17 (2006.01); H03H 9/19 (2006.01); H03L 1/02 (2006.01); H03L 1/04 (2006.01)
CPC H03H 9/215 (2013.01) [B81B 3/0072 (2013.01); B81B 7/0048 (2013.01); G01C 19/56 (2013.01); G01C 19/5621 (2013.01); H03B 5/32 (2013.01); H03H 3/0076 (2013.01); H03H 9/02023 (2013.01); H03H 9/02102 (2013.01); H03H 9/02157 (2013.01); H03H 9/0509 (2013.01); H03H 9/0542 (2013.01); H03H 9/0547 (2013.01); H03H 9/1021 (2013.01); H03H 9/177 (2013.01); H03H 9/19 (2013.01); H03L 1/028 (2013.01); H03L 1/04 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A vibrator device comprising:
a vibrating gyro element;
a supporting member supporting the vibrating gyro element; and
a substrate to which the supporting member is attached,
wherein the vibrating gyro element comprises:
a base;
a vibration portion extending from the base;
a supporting arm extending from the base; and
a supporting portion connected to the supporting arm,
wherein the supporting portion includes a fixed portion attached to the supporting member, and
the supporting member includes an attaching portion that is attached to the substrate,
wherein A1≥A2 is satisfied, wherein an area of the fixed portion is the A1 and an area of an attaching portion is the A2 in a plan view seen from a direction in which the vibrating gyro element and the supporting member overlap, and
the fixed portion includes the attaching portion in the plan view.