US 12,034,432 B2
Vibration element, vibrator, and method for producing vibration element with a vibrating piece having a protruding part for improved vibration characteristics
Toru Kizu, Nagaokakyo (JP); Hiroshi Kumano, Nagaokakyo (JP); and Koki Sai, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Jul. 6, 2021, as Appl. No. 17/367,951.
Application 17/367,951 is a continuation of application No. PCT/JP2020/010482, filed on Mar. 11, 2020.
Claims priority of application No. 2019-061849 (JP), filed on Mar. 27, 2019.
Prior Publication US 2021/0336602 A1, Oct. 28, 2021
Int. Cl. H03H 9/17 (2006.01); H03H 3/02 (2006.01)
CPC H03H 9/178 (2013.01) [H03H 3/02 (2013.01); H03H 2003/022 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A vibrator comprising:
a vibration element including a vibrating piece having a central portion and a peripheral portion, wherein a thickness of the peripheral portion is smaller than a thickness of the central portion;
a pair of excitation electrodes disposed on a first side and a second side of a main surface of the central portion, respectively;
a pair of connection electrodes disposed on the peripheral portion and electrically connected to the pair of excitation electrodes;
a substrate configured to be connected to the pair of connection electrodes via an electrically-conductive holding member interposed therebetween and configured to support the vibration element in an excitable manner; and
a lid configured to cover the vibration element;
wherein the vibrating piece includes a protruding part provided in contact with the central portion when the main surface of the central portion is viewed in a plan view, and
wherein the protruding part is configured to contact the substrate or the lid when the vibration element is inclined toward the substrate or the lid while being supported on a side where the pair of connection electrodes are disposed.