US 12,034,430 B2
Vibrator device
Shoichiro Kasahara, Minowa (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Aug. 11, 2021, as Appl. No. 17/399,452.
Claims priority of application No. 2020-136443 (JP), filed on Aug. 12, 2020.
Prior Publication US 2022/0052668 A1, Feb. 17, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/17 (2006.01)
CPC H03H 9/172 (2013.01) 11 Claims
OG exemplary drawing
 
1. A vibrator device comprising:
a package including a base that is a semiconductor substrate and a lid that is a semiconductor substrate, the package having a housing section therein;
a vibrator element and a passive element housed in the housing section and placed at the base;
an oscillation circuit placed at the base and electrically coupled to the vibrator element; and
a mounting terminal placed at the package and electrically coupled to the passive element,
wherein at least one of the base and the lid is coupled to fixed potential, and
the oscillation circuit is so placed as to face a surface of the base that is an opposite surface from the housing section.