| CPC H01L 29/778 (2013.01) [H01L 21/02458 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 29/2003 (2013.01); H01L 29/402 (2013.01); H01L 29/66462 (2013.01)] | 9 Claims |
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1. A method for preparing a GaN-HEMT device with a sandwich structure, wherein the GaN-HEMT device comprises an epitaxial layer and electrodes, wherein the epitaxial layer comprises a GaN channel layer and an AlyGa1-y barrier layer, and y is 0.2 to 0.3; the GaN channel layer and the AlyGa1-y barrier layer are arranged from top to bottom; the electrodes comprise a gate electrode, a source electrode, a drain electrode and a field plate electrode, wherein the field plate electrode and the gate electrode are respectively fabricated on an upper surface and a lower surface of the epitaxial layer, and the field plate electrode extends to a region beyond the epitaxial layer and is connected with the gate electrode to form the sandwich structure, and the source electrode and the drain electrode are respectively located at two ends of the epitaxial layer,
wherein the method comprises following steps:
(1) sequentially growing an epitaxial buffer layer, a GaN channel layer and an AlyGa1-y barrier layer on an epitaxial silicon substrate by using MOCVD to obtain an epitaxial wafer;
(2) using photoetching and ICP etching technology to prepare alignment marks required by multilayer photoetching steps on a surface of the epitaxial wafer to obtain etched mark points;
(3) according to the etched mark points, photoetching HEMT source electrode and drain electrode patterns in corresponding regions on the surface of the epitaxial wafer, depositing Ti/Al/Ni/Au metal electrodes by using a method of electron beam evaporation coating, and then performing rapid high-temperature annealing on the epitaxial wafer to prepare a source electrode and a drain electrode to form an ohmic contact electrode, wherein an annealing temperature is 830 to 850° C. and an annealing time is 30 to 60 s;
(4) photoetching the epitaxial wafer with the ohmic contact electrode prepared in the step (3), covering a device region with photoresist, and then performing mesa isolation on the GaN-HEMT device region by using the method of ICP etching;
(5) photoetching a gate electrode region of HEMT in corresponding region of the surface of epitaxial wafer after mesa isolation, and depositing a Ni/Au metal electrode by using the method of electron beam evaporation coating to prepare a gate electrode, thereby forming a Schottky electrode to obtain a wafer of the gate electrode;
(6) by using a method of PECVD, growing one layer of silicon dioxide passivation film layer on the surface of the wafer with the gate electrode prepared, so as to obtain a passivation wafer;
(7) bonding the passivation wafer with a bonded silicon substrate together in a metal hot-press bonding mode, wherein specific steps are as follows: depositing a Ni/Au/Sn/Au multi-metal layer on a surface of the passivation wafer where the silicon dioxide passivation film layer is grown, depositing a Ti/Au/Sn/Au multi-metal layer on a surface of the bonded silicon substrate, and then adhering the two metal layers together, and putting them into a hot-press bonding machine for hot-press cementing to obtain a bonded wafer;
(8) putting the bonded wafer into a mechanical thinning machine, grinding and thinning the epitaxial silicon substrate, controlling a thinning thickness, and leaving the epitaxial silicon substrate with a thickness of 30 to 50 μm, and then soaking the bonded wafer in a nitric acid/hydrofluoric acid/acetic acid mixed acid solution with a volume ratio of 3: 1: 1 to 3: 1: 2 for 5 to 10 minutes to completely remove the epitaxial silicon substrate and expose AIN of the epitaxial buffer layer; etching the exposed AIN of the epitaxial buffer layer to a C-doped high-resistance GaN layer by using ICP to obtain a wafer with the epitaxial buffer layer etched;
(9) performing photoetching on the wafer with the epitaxial buffer layer etched, and exposing an opening etching region in the corresponding regions of the source electrode, the drain electrode and the gate electrode, performing electrode opening etching by using ICP technology, and then depositing a Ni/Au lead electrode by using the method of the electron beam evaporation coating, and depositing the Ni/Au metal layer at a position, opposite to gate electrode, on an upper surface of the epitaxial layer at the same time, so as to prepare a field plate electrode and form an inverted GaN-HEMT device with a sandwich structure.
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