US 12,033,941 B2
Trimming circuit and trimming method
Morio Iwamizu, Matsumoto (JP)
Assigned to FUJI ELECTRIC CO., LTD., Kanagawa (JP)
Filed by FUJI ELECTRIC CO., LTD., Kanagawa (JP)
Filed on Apr. 21, 2021, as Appl. No. 17/235,956.
Application 17/235,956 is a continuation of application No. PCT/JP2020/015432, filed on Apr. 3, 2020.
Claims priority of application No. 2019-096539 (JP), filed on May 23, 2019; and application No. 2019-132095 (JP), filed on Jul. 17, 2019.
Prior Publication US 2021/0280515 A1, Sep. 9, 2021
Int. Cl. H01L 23/525 (2006.01); H01L 21/768 (2006.01); H01L 27/02 (2006.01); H01L 27/06 (2006.01); H01L 27/088 (2006.01); H01L 29/868 (2006.01)
CPC H01L 23/5256 (2013.01) [H01L 21/76886 (2013.01); H01L 27/0255 (2013.01); H01L 27/0629 (2013.01); H01L 27/088 (2013.01); H01L 29/868 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A trimming circuit comprising:
a body portion configured to output a voltage according to a presence or absence of disconnection of a fuse resistor, the body portion including:
a fuse resistor formed by a polysilicon layer arranged on a semiconductor substrate via an insulating film;
a pad for trimming connected to one end of the fuse resistor;
an output terminal electrically connected to a connection point between the fuse resistor and the pad, and configured to output a voltage according to the presence or absence of disconnection of the fuse resistor; and
a diode formed on the semiconductor substrate, having one end connected to another end of the fuse resistor;
a second resistance portion having one end connected to the connection point between the fuse resistor and the pad, and another end connected to second potential; and
a protection diode connected between the other end of the second resistance portion and the output terminal.