CPC H01L 23/46 (2013.01) [F28F 3/12 (2013.01); H01L 2924/0002 (2013.01)] | 20 Claims |
1. A system, comprising:
at least one heat-generating structure; and
a cooling system including:
a cooling element in communication with a fluid, the cooling element being configured to direct the fluid using vibrational motion to extract heat from the heat-generating structure, the cooling element including a first cantilevered portion, a second cantilevered portion, and a central portion between the first cantilevered portion and the second cantilevered portion, the central portion being anchored, the first cantilevered portion and the second cantilevered portion undergoing the vibrational motion when activated, the vibrational motion drawing the fluid into the cooling system through at least a top vent located above the cooling element and drive the fluid through a first set of orifices located below the first cantilevered portion and a second set of orifices located below the second cantilevered portion, wherein the first set of orifices and the second set of orifices are located between a central portion of an orifice plate; and
an exhaust system configured to receive the fluid from the first set of orifices and the second set of orifices and direct fluid away from the heat-generating structure to extract the heat and to draw the fluid toward the cooling element.
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