US 12,033,885 B2
Channeled lift pin
Govindarajasekhar Singu, Phoenix, AZ (US); Dinkar Nandwana, Tempe, AZ (US); Todd Robert Dunn, Cave Creek, AZ (US); Shankar Swaminathan, Phoenix, AZ (US); Bhushan Zope, Phoenix, AZ (US); and Carl Louis White, Gilbert, AZ (US)
Assigned to ASM IP Holding B.V., (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Jan. 4, 2021, as Appl. No. 17/140,661.
Claims priority of provisional application 62/957,516, filed on Jan. 6, 2020.
Prior Publication US 2021/0210373 A1, Jul. 8, 2021
Int. Cl. H01L 21/687 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/68742 (2013.01) [H01L 21/6838 (2013.01)] 14 Claims
OG exemplary drawing
 
12. A lift pin configured to be disposed in a susceptor comprised in a reactor system, comprising:
a pin body defined by a pin outer surface, wherein the pin body comprises a groove in the pin outer surface pin channel, defined by a pin channel groove surface, extending a length of the pin body;
a pin bottom; and
a pin head, wherein the pin head is disposed at a top end of the pin body, wherein the groove extends through the pin head and pin body;
wherein the pin body spans between the pin head and the pin bottom, and
wherein a cross-sectional dimension of the pin head is greater than a cross-sectional dimension of the pin body.