US 12,033,879 B2
Transfer apparatus having link arms and stockers having the same
Sangmin Kim, Yongin-si (KR); Youngwook Kim, Seoul (KR); Ginam Park, Incheon (KR); Chuljun Park, Seoul (KR); Jeongjae Bang, Suwon-si (KR); Jaesung Byun, Suwon-si (KR); Yongjun Ahn, Suwon-si (KR); Sangkyung Lee, Hwaseong-si (KR); Hyunwoo Lee, Hwaseong-si (KR); and Junhyuk Chang, Seoul (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Mar. 1, 2022, as Appl. No. 17/683,769.
Claims priority of application No. 10-2021-0103189 (KR), filed on Aug. 5, 2021.
Prior Publication US 2023/0041221 A1, Feb. 9, 2023
Int. Cl. H01L 21/677 (2006.01); B65G 1/06 (2006.01); B65G 1/127 (2006.01); H01L 21/673 (2006.01)
CPC H01L 21/67766 (2013.01) [B65G 1/06 (2013.01); B65G 1/127 (2013.01); H01L 21/67379 (2013.01); H01L 21/6773 (2013.01); B65G 2201/0297 (2013.01)] 20 Claims
OG exemplary drawing
 
20. A stocker, comprising:
shelves configured to receive a wafer stacking box; and
a transfer apparatus configured to be movable among the shelves,
wherein the transfer apparatus includes
a lower plate including a lower link arm and a lower support, the lower support being fixed to an upper surface of the lower plate,
an upper plate on the lower plate, the upper plate configured to support the wafer stacking box on an upper surface of the upper plate, the upper plate including
an upper link arm, and
an upper support that is fixed to the upper surface of the upper plate, and
a fixing member that is connected to the upper link arm, the fixing member configured to selectively contact the wafer stacking box,
wherein the upper plate is aligned with the lower plate in a first horizontal direction, and is configured to perform linear movement on the lower plate in the first horizontal direction.