CPC H01L 21/67742 (2013.01) [B25J 9/02 (2013.01); B25J 9/12 (2013.01); B25J 11/0095 (2013.01); H02K 7/14 (2013.01); H02K 41/02 (2013.01); H01L 21/67167 (2013.01); H01L 21/67748 (2013.01); H01L 21/68707 (2013.01)] | 4 Claims |
1. A substrate transfer apparatus comprising:
a transfer unit configured to transfer a substrate into a processing chamber in which the substrate is processed therein, the transfer unit further including:
a substrate support configured to support the substrate;
two bases configured to be electro-magnetically levitated on a plane and to be movable on the plane,
a first link, second link, third link, and fourth link configured to connect the two bases to the substrate support and to be extended in a horizontal direction, such that: one end of the first link is rotatably connected to one of the bases, and a remaining end thereof is rotatably connected to one end of the fourth link; one end of the second link is rotatably connected to a remaining base, and a remaining end thereof is rotatably connected to one end of the third link; the remaining end of the third link is rotatably connected to the substrate support; the remaining end of the fourth link is rotatably connected to the substrate support; and a middle of the first link and a middle of the second link are rotatably connected to each other; and
a controller configured to control the transfer unit,
wherein the controller is programmed to control the transfer unit to change an extension amount of the substrate support in the horizontal direction to transfer the substrate into the processing chamber, by changing a space between the two bases.
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