US 12,033,845 B2
Laser-sustained plasma source based on colliding liquid jets
John Szilagyi, Livermore, CA (US); and Ilya Bezel, Mountain View, CA (US)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Apr. 7, 2023, as Appl. No. 18/132,162.
Claims priority of provisional application 63/331,895, filed on Apr. 18, 2022.
Prior Publication US 2023/0335389 A1, Oct. 19, 2023
Int. Cl. H01J 65/04 (2006.01); H01J 61/02 (2006.01); H01J 61/16 (2006.01); H01J 61/28 (2006.01); H01J 61/52 (2006.01)
CPC H01J 65/042 (2013.01) [H01J 61/025 (2013.01); H01J 61/16 (2013.01); H01J 61/28 (2013.01); H01J 61/52 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A broadband light source comprising:
a gas containment structure;
a plurality of jet nozzles, wherein the plurality of jet nozzles are configured to direct a plurality of liquid jets to collide within the gas containment structure, wherein the plurality of liquid jets include a first liquid jet and at least a second jet;
a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure at a collision point of the plurality of liquid jets; and
a light collector element configured to collect at least a portion of broadband light emitted from the plasma.