US 12,033,842 B2
Mass spectrometer and method of controlling the same
Hiroyuki Yasuda, Tokyo (JP); Yuichiro Hashimoto, Tokyo (JP); Yuka Sugawara, Tokyo (JP); and Riku Tamura, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Appl. No. 17/628,388
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Jul. 22, 2020, PCT No. PCT/JP2020/028373
§ 371(c)(1), (2) Date Jan. 19, 2022,
PCT Pub. No. WO2021/020260, PCT Pub. Date Feb. 4, 2021.
Claims priority of application No. 2019-138005 (JP), filed on Jul. 26, 2019.
Prior Publication US 2022/0270868 A1, Aug. 25, 2022
Int. Cl. H01J 49/06 (2006.01); G01N 30/72 (2006.01); G01N 35/00 (2006.01); H01J 49/24 (2006.01); H01J 49/42 (2006.01); G01N 30/32 (2006.01)
CPC H01J 49/063 (2013.01) [G01N 30/72 (2013.01); G01N 35/00584 (2013.01); H01J 49/24 (2013.01); H01J 49/42 (2013.01); G01N 2030/326 (2013.01); G01N 2030/328 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A mass spectrometer comprising:
a first vacuum chamber;
a first communication hole configured to communicate an atmosphere with the first vacuum chamber;
a first vacuum pump configured to evacuate air from the first vacuum chamber;
an atmospheric pressure relating value acquiring unit configured to acquire an atmospheric pressure relating value relating to an atmospheric pressure;
an adjustment unit configured to adjust an effective exhaust velocity of the first vacuum pump; and
a controller configured to control the adjustment unit,
wherein: the controller acquires the atmospheric pressure relating value and controls the adjustment unit such that a pressure of the first vacuum chamber is a predetermined reference value corresponding to the atmospheric pressure relating value; and
the atmospheric pressure relating value is a value indicating an atmospheric pressure.