US 12,033,830 B2
Multiple charged-particle beam apparatus with low crosstalk
Weiming Ren, San Jose, CA (US); Xuerang Hu, San Jose, CA (US); Qingpo Xi, Fremont, CA (US); and Xuedong Liu, San Jose, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Sep. 13, 2022, as Appl. No. 17/944,157.
Application 17/944,157 is a continuation of application No. 16/886,461, filed on May 28, 2020, granted, now 11,469,074.
Claims priority of provisional application 62/853,677, filed on May 28, 2019.
Prior Publication US 2023/0020194 A1, Jan. 19, 2023
Int. Cl. H01J 37/244 (2006.01); H01J 37/153 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/244 (2013.01) [H01J 37/153 (2013.01); H01J 37/28 (2013.01); H01J 2237/0453 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/2448 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A multi charged-particle beam apparatus comprising:
an electro-optical system for projecting a plurality of secondary charged-particle beams from a sample onto a charged-particle detector, the electro-optical system comprising:
a first pre-limit aperture plate comprising a first aperture configured to block peripheral charged-particles of the plurality of secondary charged-particle beams; and
a beam-limit aperture array comprising a second aperture configured to trim the plurality of secondary charged-particle beams,
wherein the charged-particle detector includes a plurality of detection elements, and wherein a detection element of the plurality of detection elements is associated with a corresponding trimmed beam of the plurality of secondary charged-particle beams.