US 12,032,304 B2
Cleaning system, exposure machine, and cleaning method
Lulu Fang, Hefei (CN); and Xueyu Liang, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Jun. 14, 2022, as Appl. No. 17/839,824.
Application 17/839,824 is a continuation of application No. PCT/CN2021/109064, filed on Jul. 28, 2021.
Claims priority of application No. 202011313117.7 (CN), filed on Nov. 20, 2020.
Prior Publication US 2022/0308467 A1, Sep. 29, 2022
Int. Cl. G03F 1/82 (2012.01); G03F 7/00 (2006.01)
CPC G03F 7/70925 (2013.01) [G03F 1/82 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A cleaning system, integrated in an exposure machine, the exposure machine comprising an immersion cover and a workbench arranged to be movable in translation below the immersion cover, the cleaning system comprising:
an image acquisition component, disposed on a surface of the workbench and configured to acquire image information of a through hole of the immersion cover;
a cleaning component, comprising a cleaning pipe and a vacuum pump, wherein the cleaning pipe is disposed inside the workbench, a first end of the cleaning pipe extends out of a top surface of the workbench, and the vacuum pump is connected to a second end of the cleaning pipe; and
a controller, electrically connected to the image acquisition component and the vacuum pump,
wherein the controller is configured to judge whether the through hole is blocked according to the image information, to control the workbench to be moved in translation so that the first end of the cleaning pipe is located directly below the blocked through hole, and to control the vacuum pump to apply a negative pressure to the blocked through hole through the cleaning pipe to clean the immersion cover.