US 12,032,294 B2
Abnormality detection device of chemical solution, liquid processing device, substrate processing apparatus, abnormality detection method of chemical solution, liquid processing method, and substrate processing method
Masato Hayashi, Koshi (JP); Takuya Mori, Tokyo (JP); Hideo Shite, Koshi (JP); and Hirokazu Sakamoto, Koshi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Appl. No. 17/048,214
Filed by Tokyo Electron Limited, Tokyo (JP)
PCT Filed Apr. 1, 2019, PCT No. PCT/JP2019/014495
§ 371(c)(1), (2) Date Oct. 16, 2020,
PCT Pub. No. WO2019/202962, PCT Pub. Date Oct. 24, 2019.
Claims priority of application No. 2018-080209 (JP), filed on Apr. 18, 2018; and application No. 2018-169007 (JP), filed on Sep. 10, 2018.
Prior Publication US 2021/0157237 A1, May 27, 2021
Int. Cl. G03F 7/16 (2006.01); B05C 9/14 (2006.01); B05C 11/08 (2006.01); H01L 21/027 (2006.01); H01L 21/66 (2006.01)
CPC G03F 7/162 (2013.01) [B05C 9/14 (2013.01); B05C 11/08 (2013.01); G03F 7/168 (2013.01); H01L 21/0273 (2013.01); H01L 22/20 (2013.01)] 16 Claims
OG exemplary drawing
 
12. An abnormality detection method of a chemical solution, comprising:
supplying a chemical solution containing polymers configured to form a coating film on a target object into a chemical solution flow path;
irradiating a laser beam to the chemical solution flow path by a laser beam irradiator;
outputting a signal from a light receiving element configured to receive light supplied from the chemical solution flow path; and
detecting, based on the signal output from the light receiving element, an abnormality in a state of polymers corresponding to a majority of the polymers contained in the chemical solution,
wherein the detecting of the abnormality in the state of the polymers includes detecting an abnormality of a particle diameter of the polymers based on a background signal for detecting a foreign matter of the chemical solution, and
when a standard deviation of optical particle diameters of the polymers is σ, the majority of the polymers are polymers having optical particle diameters with deviations of ±3σ or less from an average value.