US 12,032,281 B2
Pellicle cleaning apparatus and pellicle cleaning method using the same
Byunghoon Lee, Seoul (KR); Jin Goo Park, Ansan-si (KR); Tae-Gon Kim, Ansan-si (KR); Sanguk Park, Yongin-si (KR); Changyoung Jeong, Yongin-si (KR); Jinho Ahn, Seoul (KR); and Hyun-tae Kim, Anyang-si (KR)
Assigned to Samsung Electronics Co., Ltd., (KR); and INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS, (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Aug. 17, 2022, as Appl. No. 17/889,472.
Claims priority of application No. 10-2021-0185830 (KR), filed on Dec. 23, 2021.
Prior Publication US 2023/0205078 A1, Jun. 29, 2023
Int. Cl. B08B 7/00 (2006.01); B08B 11/02 (2006.01); B08B 13/00 (2006.01); G03F 1/82 (2012.01); G03F 7/00 (2006.01)
CPC G03F 1/82 (2013.01) [B08B 7/0028 (2013.01); B08B 11/02 (2013.01); B08B 13/00 (2013.01); G03F 7/70925 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A pellicle cleaning apparatus, comprising:
a stage to support a pellicle;
a particle remover above the stage, the particle remover being configured to remove a particle from a first surface of the pellicle, and the particle remover including:
a cantilever, and
an adhesive material on a bottom surface of the cantilever; and
a pressure controller adjacent to the stage, the pressure controller being arranged to supply air current to a second surface of the pellicle so as to control vibration of the pellicle, wherein
the pellicle is controlled to spread flat when the air current supplied by the pressure controller to the second surface of the pellicle has a same strength as air current on the first surface of the pellicle,
the pellicle is controlled to protrude convexly upwards when the air current supplied by the pressure controller to the second surface of the pellicle is stronger than the air current on the first surface of the pellicle, or
the pellicle is controlled to protrude concavely downwards when the air current supplied by the pressure controller to the second surface of the pellicle is weaker than the air current on the first surface of the pellicle.