US 12,032,232 B2
Optical element array, optical system and method of manufacturing optical element array
Dongsik Shim, Hwaseong-si (KR); Changgyun Shin, Anyang-si (KR); and Changbum Lee, Seoul (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Apr. 26, 2023, as Appl. No. 18/307,080.
Application 18/307,080 is a division of application No. 16/426,861, filed on May 30, 2019, granted, now 11,675,220.
Claims priority of application No. 10-2018-0158461 (KR), filed on Dec. 10, 2018.
Prior Publication US 2023/0258966 A1, Aug. 17, 2023
Int. Cl. H01S 5/02 (2006.01); G01S 7/481 (2006.01); G02F 1/025 (2006.01); H01S 5/00 (2006.01); H01S 5/028 (2006.01); H01S 5/30 (2006.01); H01S 5/40 (2006.01); G02F 1/29 (2006.01)
CPC G02F 1/025 (2013.01) [G01S 7/4814 (2013.01); H01S 5/0071 (2013.01); H01S 5/0201 (2013.01); H01S 5/021 (2013.01); H01S 5/0218 (2013.01); H01S 5/0282 (2013.01); H01S 5/3013 (2013.01); H01S 5/4025 (2013.01); H01S 5/4075 (2013.01); G02F 1/292 (2013.01); G02F 2203/24 (2013.01); G02F 2203/50 (2013.01); H01S 5/005 (2013.01); H01S 2301/176 (2013.01)] 10 Claims
OG exemplary drawing
 
1. An optical element array comprising:
a silicon substrate;
a first element layer provided on the silicon substrate, the first element layer comprising a waveguide configured to transmit light, a phase modulator configured to adjust a phase of the light, and an antenna configured to adjust a traveling direction of light with the phase modulated by the phase modulator; and
a second element layer provided on the waveguide, the second element layer comprising an active optical element that is configured to generate light and comprises a semiconductor material, wherein the active optical element comprises proton implant layers spaced apart from one another.