US 12,032,184 B2
Terahertz wave lens and method for producing terahertz wave lens
Shohei Hayashi, Hamamatsu (JP); Tetsushi Shimomura, Hamamatsu (JP); and Hiroyasu Fujiwara, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed on Dec. 14, 2020, as Appl. No. 17/120,885.
Claims priority of application No. 2019-230452 (JP), filed on Dec. 20, 2019.
Prior Publication US 2021/0194144 A1, Jun. 24, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. G02B 5/18 (2006.01); C23F 4/00 (2006.01); G02B 3/00 (2006.01); G02B 3/08 (2006.01); H01Q 15/02 (2006.01); H01Q 15/04 (2006.01)
CPC G02B 5/1866 (2013.01) [C23F 4/00 (2013.01); G02B 5/1809 (2013.01); G02B 5/1857 (2013.01); G02B 5/1871 (2013.01); G02B 5/1876 (2013.01); G02B 2003/0093 (2013.01); G02B 3/08 (2013.01); H01Q 15/02 (2013.01); H01Q 15/04 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A terahertz wave lens that concentrates or collimates a terahertz wave in a terahertz band between 0.3 THz and 3 THz, the terahertz wave lens comprising:
a substrate having a surface provided with an uneven structure,
wherein the uneven structure includes a plurality of uneven portions formed of protrusions that are periodically arranged on the substrate,
the uneven structure includes a plurality of regions where the plurality of uneven portions are arranged on the surface of the substrate,
a height of the protrusion of the uneven portion in a thickness direction is measured from the surface of the substrate to a top of the protrusion, a width of the protrusion of the uneven portion is in a direction orthogonal to the thickness direction, and the height of the protrusion and the width of the protrusion differ for each of the plurality of regions,
distances between centers of adjacent protrusions are constant,
the distance between the centers of the uneven portions adjacent to each other is set to a sub-wavelength period smaller than a wavelength of the terahertz wave, and
outer end portions of the uneven structure in the thickness direction are located on a same plane.