US 12,032,148 B2
Microscope slide, method for manufacturing microscope slide, observation method, and analysis method
Toru Fujimura, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/047,097
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Apr. 17, 2018, PCT No. PCT/JP2018/015800
§ 371(c)(1), (2) Date Oct. 13, 2020,
PCT Pub. No. WO2019/202650, PCT Pub. Date Oct. 24, 2019.
Prior Publication US 2021/0149172 A1, May 20, 2021
Int. Cl. C03C 15/00 (2006.01); C03C 17/23 (2006.01); C03C 17/30 (2006.01); G01N 1/28 (2006.01); G02B 21/34 (2006.01)
CPC G02B 21/34 (2013.01) [C03C 15/00 (2013.01); C03C 17/23 (2013.01); C03C 17/30 (2013.01); G01N 1/28 (2013.01); C03C 2217/231 (2013.01); C03C 2217/76 (2013.01); C03C 2217/948 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A manufacturing method of a microscope slide comprising:
a first step of preparing a transparent substrate having a surface on which a colored resin film is partially formed;
a second step of etching a first region that is at least a part of the surface of the substrate on which the resin film is formed, by etching with reactive ions etching a material of the substrate to introduce a surface shape including convex portions at a higher density than 25 per 1 μm2 in a plan view;
a third step of ashing at least a part of the resin film and the first region with oxygen reactive ions after the second step,
wherein coloring of a part of the resin film to which ashing with the oxygen reactive ions has been performed is lighter than coloring of the resin film when viewed from a side opposite to the surface including the resin film.