US 12,032,094 B2
Chip-scale silicon-based hybrid-integrated LiDAR system
Liangjun Lu, Shanghai (CN); Weihan Xu, Shanghai (CN); Linjie Zhou, Shanghai (CN); Jiao Liu, Shanghai (CN); and Jianping Chen, Shanghai (CN)
Assigned to Shanghai Jiao Tong University, Shanghai (CN)
Filed by Shanghai Jiao Tong University, Shanghai (CN)
Filed on Feb. 8, 2021, as Appl. No. 17/170,715.
Application 17/170,715 is a continuation of application No. PCT/CN2019/084038, filed on Apr. 24, 2019.
Claims priority of application No. 201910187328.1 (CN), filed on Mar. 13, 2019.
Prior Publication US 2021/0181310 A1, Jun. 17, 2021
Int. Cl. G01S 7/48 (2006.01); G01S 7/481 (2006.01); G01S 17/42 (2006.01); G01S 17/88 (2006.01)
CPC G01S 7/4813 (2013.01) [G01S 7/4818 (2013.01); G01S 17/42 (2013.01); G01S 17/88 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A chip-scale silicon-based hybrid-integrated LiDAR system, comprising
a transmitting end (Tx),
a receiving end (Rx), and
a backup receiving end (Bk),
wherein the transmitting end sequentially comprises a hybrid-integrated narrow-linewidth tunable laser module (101), a silicon-nitride-integrated beam splitter module (102), a silicon-integrated phase shifter array module (103) and a silicon-nitride-integrated unidirectional transmitting antenna array module (104) w.r.t the optical path;
the receiving end comprises a silicon-nitride-integrated unidirectional receiving antenna array module (201), a silicon-nitride-integrated beam splitter module (202) and a silicon-integrated coherent receiving module (203);
the backup receiving end sequentially comprises a spatial optical module (301) and an off-chip coherent receiving module (302) w.r.t the optical path;
the electric control of the hybrid-integrated narrow-linewidth tunable laser module (101) and the phase shifter of the silicon-integrated phase shifter array module (103) at the transmitting end and the signal processing of the silicon-integrated coherent receiving module (203) at the receiving end are implemented by a piggybacked high-speed integrated circuit module outside the photonic chip system on a ad-hoc basis.