US 12,032,043 B2
Magnetic sensor
Sho Tonegawa, Ichihara (JP); Akira Sakawaki, Ichihara (JP); Yasumasa Watanabe, Ichihara (JP); Daizo Endo, Ichihara (JP); Tomoyuki Noguchi, Ichihara (JP); and Yuta Miyamoto, Ichihara (JP)
Assigned to Resonac Corporation, Tokyo (JP)
Filed by SHOWA DENKO K.K., Tokyo (JP)
Filed on Oct. 12, 2021, as Appl. No. 17/499,513.
Claims priority of application No. 2020-178835 (JP), filed on Oct. 26, 2020.
Prior Publication US 2022/0128634 A1, Apr. 28, 2022
Int. Cl. G01R 33/06 (2006.01); H01L 43/02 (2006.01); H01L 43/12 (2006.01); H10N 50/01 (2023.01); H10N 50/80 (2023.01)
CPC G01R 33/063 (2013.01) [H10N 50/01 (2023.02); H10N 50/80 (2023.02)] 4 Claims
OG exemplary drawing
 
1. A magnetic sensor comprising:
a non-magnetic substrate; and
a sensitive element that is provided on the substrate, composed of a soft magnetic material, having a longitudinal direction and a short direction, provided with uniaxial magnetic anisotropy in a direction crossing the longitudinal direction, having a width at a center the longitudinal direction that is smaller compared to a width at each of both end portions in the longitudinal direction, and sensing a magnetic field by a magnetic impedance effect,
wherein, in the sensitive element, a width in the short direction is continuously reduced from both of the end portions to the center in the longitudinal direction.