CPC G01R 31/2893 (2013.01) [B65G 47/912 (2013.01); G01R 1/073 (2013.01); G01R 31/2868 (2013.01); G01R 31/2887 (2013.01)] | 31 Claims |
1. A chip detection device, comprising: support plates, a detection platform erected between two of the support plates, a first driving device disposed on the support plate and capable of a linear motion, and a probe holder disposed above the detection platform and connected to the first driving device;
the detection platform comprises:
a turntable of a cylindrical structure, with two ends rotatably connected to the support plates;
a vacuum ring, having one end provided with an end face fixedly connected to the support plate, and the other end provided with an end face hermetically and rotatably connected to an end face of the turntable;
a second driving device disposed on the support plate and capable of driving the turntable to rotate;
at least three groups of chip test trays uniformly distributed on a cylindrical surface of the turntable, each group of chip test trays being arranged in a length direction of the cylindrical surface of the turntable;
wherein the chip test tray is provided with a chip placement slot, bottoms of the chip placement slots on all of the chip test trays are electrically communicated with each other, and a center of the bottom of the chip placement slot is provided with an adsorption through hole;
the turntable is provided with
a main gas hole disposed in an axial direction of the turntable and corresponding to the chip test tray in a radial direction of the turntable, an end of the main gas hole close to the vacuum ring being opened and the other end thereof being closed; and
a branch gas hole which communicates the main gas hole and the adsorption through hole of the chip test tray;
the vacuum ring is provided with a negative-pressure gas hole which has one orifice located on an end face of the vacuum ring abutting against the turntable and on a same circumference as the main gas hole, and the other orifice connected to a negative-pressure gas source;
the orifice of the negative-pressure gas hole or an orifice of the main gas hole is provided with a communication slot which communicates the negative-pressure gas hole and the main gas hole when they are staggered.
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