US 12,031,987 B2
System and method for transistor pathogen detector
Adam Khan, San Francisco, CA (US); Ernest Schirmann, Lake Zurich, IL (US); and Kiran Kumar Kovi, Lisle, IL (US)
Assigned to AKHAN SEMICONDUCTOR, INC., Gurnee, IL (US)
Filed by AKHAN Semiconductor, Inc., Gurnee, IL (US)
Filed on Apr. 19, 2021, as Appl. No. 17/234,709.
Claims priority of provisional application 63/011,712, filed on Apr. 17, 2020.
Prior Publication US 2021/0349091 A1, Nov. 11, 2021
Int. Cl. B32B 9/00 (2006.01); C01B 32/198 (2017.01); C01B 32/26 (2017.01); C23C 16/02 (2006.01); C23C 16/27 (2006.01); C23C 16/513 (2006.01); G01N 27/414 (2006.01); G01N 33/551 (2006.01); G01N 33/569 (2006.01); H01L 29/66 (2006.01); B82Y 5/00 (2011.01); B82Y 30/00 (2011.01); B82Y 35/00 (2011.01); B82Y 40/00 (2011.01)
CPC G01N 33/56983 (2013.01) [C01B 32/198 (2017.08); C01B 32/26 (2017.08); C23C 16/0236 (2013.01); C23C 16/271 (2013.01); C23C 16/274 (2013.01); C23C 16/279 (2013.01); C23C 16/513 (2013.01); G01N 27/4145 (2013.01); G01N 33/551 (2013.01); H01L 29/66969 (2013.01); B82Y 5/00 (2013.01); B82Y 30/00 (2013.01); B82Y 35/00 (2013.01); B82Y 40/00 (2013.01); C01B 2204/22 (2013.01); C01B 2204/32 (2013.01); C01P 2002/60 (2013.01); C01P 2004/16 (2013.01); C01P 2004/64 (2013.01); G01N 2333/165 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A transistor pathogen detector, comprising:
A substrate layer,
a silicon dioxide layer on the substrate layer,
a nanocrystalline diamond layer on the silicon dioxide layer,
a graphene oxide layer on the nanocrystalline diamond layer,
fluorinated graphene oxide portions; and
a linker layer, the linker layer including a plurality of pathogen receptors, wherein the transistor pathogen detector functions as a biosensor field effect transistor.