US 12,031,924 B2
Measurement arrangement for X-ray radiation for gap-free 1D measurement
Jürgen Fink, Elchesheim-Illingen (DE); Christian Maurer, Karlsruhe (DE); Lutz Brügemann, Durmersheim (DE); and Cristian Venanzi, Karlsruhe (DE)
Appl. No. 17/432,676
Filed by Bruker AXS GmbH, Karlsruhe (DE)
PCT Filed Feb. 18, 2020, PCT No. PCT/EP2020/054162
§ 371(c)(1), (2) Date Aug. 20, 2021,
PCT Pub. No. WO2020/169559, PCT Pub. Date Aug. 27, 2020.
Claims priority of application No. 10 2019 202 442.4 (DE), filed on Feb. 22, 2019.
Prior Publication US 2022/0034825 A1, Feb. 3, 2022
Int. Cl. G01N 23/20008 (2018.01); G01N 23/207 (2018.01)
CPC G01N 23/20008 (2013.01) [G01N 23/207 (2013.01); G01N 2223/501 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A measurement arrangement for X-ray radiation, comprising:
a sample position illuminable by an X-ray beam, and
an X-ray detector for detecting the X-ray radiation emanating from the sample position, comprising a plurality of detector modules,
wherein the detector modules each have at least one active zone, in which X-ray radiation can be detected, and a dead zone, in which no X-ray radiation can be detected and which encloses the at least one active zone,
wherein the detector modules are arranged successively in groups and/or individually in relation to a measurement direction,
wherein the active zones of the detector modules are configured in each case for X-ray radiation detection which is spatially resolved in the measurement direction,
wherein the totality of the active zones of all the detector modules of the X-ray detector has an extent AM in the measurement direction and an extent AQ in a transverse direction, where AM≥5*AQ, wherein the transverse direction runs locally transversely with respect to the measurement direction and locally transversely with respect to a connection direction with respect to the sample position,
wherein at least one portion of the detector modules that are successive in relation to the measurement direction forms overlap regions in which in each case at least two detector modules overlap in the measurement direction and are arranged next to one another in the transverse direction,
wherein the active zones of the detector modules in the overlap regions are directly adjacent to one another in the measurement direction or overlap in the measurement direction, such that the totality of the active zones of the detector modules enables the X-ray radiation emanating from the sample position to be measured without gaps in the measurement direction, and
wherein the detector modules are arranged along a circular arc around the sample position in an overlapping fashion, wherein the circular arc defines the local measurement direction at each detector module, and the detector modules are each embodied on a planar substrate oriented perpendicular to the local connection direction with respect to the sample position
and wherein at the respective detector module the measurement direction, the transverse direction and the connection direction are approximately perpendicular to one another.