US 12,031,878 B2
Pressure measuring sensor
Andreas Roßberg, Bad Säckingen (DE); and Nils Ponath, Lörrach (DE)
Assigned to Endress+Hauser SE+Co. KG, Maulburg (DE)
Appl. No. 17/756,929
Filed by Endress+Hauser SE+Co. KG, Maulburg (DE)
PCT Filed Nov. 20, 2020, PCT No. PCT/EP2020/082853
§ 371(c)(1), (2) Date Jun. 6, 2022,
PCT Pub. No. WO2021/110433, PCT Pub. Date Jun. 10, 2021.
Claims priority of application No. 10 2019 133 325.3 (DE), filed on Dec. 6, 2019.
Prior Publication US 2022/0404223 A1, Dec. 22, 2022
Int. Cl. G01L 9/12 (2006.01); G01K 7/04 (2006.01)
CPC G01L 9/125 (2013.01) [G01K 7/04 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A pressure measuring sensor, comprising:
a ceramic pressure sensor arranged in a housing, wherein the pressure sensor includes a measuring diaphragm to which can be applied a pressure through an opening in the housing;
an electromechanical transducer for metrologically capturing a deflection of the measuring diaphragm dependent upon the pressure acting on the measuring diaphragm;
a thrust ring arranged on an outer edge of a rear side and facing away from the measuring diaphragm of the pressure sensor;
a clamping device by which an outer edge region of the pressure sensor is clamped in the housing together with the thrust ring arranged thereon;
a temperature transducer for providing a thermovoltage dependent upon a temperature gradient, wherein the temperature transducer includes two series-connected thermoelements, each of which includes a galvanic contact between a conductor of the respective thermoelement and a connecting conductor connecting the galvanic contacts of the two thermoelements to one another;
an electrically conductive layer extending in a direction parallel to a surface normal of the measuring diaphragm and arranged on a lateral surface of the thrust ring, wherein the electrically conductive layer forms or includes the connecting conductor or a conducting portion of the connecting conductor, and
wherein the two galvanic contacts include one contact facing the process and one contact facing away from the process, wherein the two contacts are both arranged in the housing outside the pressure sensor and are spaced apart from each other in the direction parallel to the surface normal to the measuring diaphragm.