US 12,031,863 B2
Optical device including movable mirror and first light passage
Tatsuya Sugimoto, Hamamatsu (JP); Tomofumi Suzuki, Hamamatsu (JP); and Kyosuke Kotani, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 16/625,688
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Jul. 6, 2018, PCT No. PCT/JP2018/025634
§ 371(c)(1), (2) Date Dec. 21, 2019,
PCT Pub. No. WO2019/009392, PCT Pub. Date Jan. 10, 2019.
Claims priority of application No. 2017-133093 (JP), filed on Jul. 6, 2017.
Prior Publication US 2020/0124469 A1, Apr. 23, 2020
Int. Cl. G01J 3/02 (2006.01); G01B 9/02 (2022.01); G02B 26/12 (2006.01); G01J 3/45 (2006.01)
CPC G01J 3/021 (2013.01) [G01B 9/02 (2013.01); G02B 26/12 (2013.01); G01J 3/45 (2013.01)] 25 Claims
OG exemplary drawing
 
1. An optical device comprising:
a base which includes a main surface;
a movable mirror which includes a mirror surface following a plane parallel to the main surface;
a first elastic support portion and a second elastic support portion which are connected to the base and the movable mirror and support the movable mirror so as to be movable along a first direction perpendicular to the main surface;
an actuator which moves the movable mirror along the first direction; and
a first light passage which is disposed at one side of the movable mirror in a second direction perpendicular to the first direction when viewed from the first direction, the first light passage is a light passage having an optical path,
wherein the first elastic support portion includes a pair of first levers extending along the main surface from the movable mirror toward both sides of the first light passage in a third direction perpendicular to the first direction and the second direction,
wherein the movable mirror includes a main body having a surface parallel to the main surface, the surface provided with the mirror surface,
wherein a length of each of the pair of first levers in the second direction is larger than the shortest distance between an outer edge of the mirror surface and an edge of the light passage, and
wherein the edge of the light passage is separated from an outer edge of the main body and the shortest distance between the outer edge of the mirror surface and the edge of the light passage is larger than 0.