US 12,031,820 B2
Micromechanical system, method for operating a micromechanical system
Lars Tebje, Reutlingen (DE); Johannes Classen, Reutlingen (DE); Christof Schwenk, Stuttgart (DE); Holger Rumpf, Reutlingen (DE); Joerg Braeuer, Nehren (DE); and Torsten Ohms, Vaihingen/Enz-Aurich (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Filed by Robert Bosch GmbH, Stuttgart (DE)
Filed on Aug. 4, 2021, as Appl. No. 17/393,629.
Claims priority of application No. 102020210121.3 (DE), filed on Aug. 11, 2020.
Prior Publication US 2022/0049958 A1, Feb. 17, 2022
Int. Cl. G01C 19/5656 (2012.01); G01P 1/00 (2006.01)
CPC G01C 19/5656 (2013.01) [G01P 1/003 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A micromechanical system, comprising:
a movably suspended mass; and
a damping system including a movably suspended damping structure, the damping structure being deflectable by applying a voltage, the damping structure being configured in such a way that a frequency response of the movably suspended mass is changeable as a function of a deflection of the damping structure,
wherein the micromechanical system includes a stopper device, the deflection of the damping structure being limitable as a function of the stopper device,
wherein a targeted damping level, in which the stopper device and the damping structure come into contact, is settable by selecting a predefined distance between the stopper device and the damping structure.