US 12,031,815 B2
Magnetic linear sensor
Tetsuya Shimizu, Kyoto (JP); and Ryohei Kido, Kyoto (JP)
Assigned to Murata Machinery, Ltd., Kyoto (JP)
Appl. No. 17/600,621
Filed by Murata Machinery, Ltd., Kyoto (JP)
PCT Filed Feb. 19, 2020, PCT No. PCT/JP2020/006532
§ 371(c)(1), (2) Date Oct. 1, 2021,
PCT Pub. No. WO2020/202864, PCT Pub. Date Oct. 8, 2020.
Claims priority of application No. 2019-070439 (JP), filed on Apr. 2, 2019.
Prior Publication US 2022/0163313 A1, May 26, 2022
Int. Cl. G01B 7/00 (2006.01); G01D 5/20 (2006.01)
CPC G01B 7/003 (2013.01) [G01D 5/2086 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A magnetic linear sensor that detects a displacement of a measurement target in a displacement detection direction, comprising:
a linear scale; and
a sensor head displaceable relative to the linear scale in the displacement detection direction; wherein
the sensor head is arranged on one side of the linear scale in a first direction perpendicular to the displacement detection direction,
the linear scale includes a first magnetic response section arranged on the side facing the sensor head,
the first magnetic response section comprises a plurality of ferromagnetic portions and is configured such that changes in magnetic influence on the sensor head appear alternately and repeatedly at every first pitch in the displacement detection direction,
the sensor head comprises:
a base substrate section including at least one insulating plate; and
a plurality of detection sections placed on the insulating plate and arranged in the displacement detection direction at every second pitch which is based on the first pitch,
each of the detecting sections comprises:
a first conductive pattern;
a second conductive pattern formed at a position different from the first conductive pattern in a thickness direction of the insulating plate; and
a through hole electrically conducting the first conductive pattern and the second conductive pattern,
the first conductive pattern and the second conductive pattern are formed to arrange coil elements side by side in an elongated area in a second direction orthogonal to both the displacement detection direction and the first direction,
the first conductive pattern has a shape of a single stroke connecting a plurality of first unit elements constituting the coil elements,
the second conductive pattern has a shape of a single stroke connecting a plurality of second unit elements constituting the coil elements, and
the first unit element and the second unit element constitute a closed shape of the coil element when viewed in the thickness direction of the base substrate section,
wherein each coil element within one of the plurality of detection sections detects a same one of the plurality of ferromagnetic portions.