US 12,031,685 B2
Method and supply equipment for supplying fluorine gas-containing gas
Yuya Nishio, Tokyo (JP)
Assigned to Resonac Corporation, Tokyo (JP)
Appl. No. 17/270,679
Filed by SHOWA DENKO K.K., Tokyo (JP)
PCT Filed Jul. 30, 2019, PCT No. PCT/JP2019/029860
§ 371(c)(1), (2) Date Feb. 23, 2021,
PCT Pub. No. WO2020/049900, PCT Pub. Date Mar. 12, 2020.
Claims priority of application No. 2018-164701 (JP), filed on Sep. 3, 2018.
Prior Publication US 2021/0341103 A1, Nov. 4, 2021
Int. Cl. F17C 7/00 (2006.01); H01L 21/67 (2006.01)
CPC F17C 7/00 (2013.01) [F17C 2205/0323 (2013.01); F17C 2205/0338 (2013.01); F17C 2205/0352 (2013.01); F17C 2221/01 (2013.01); F17C 2227/044 (2013.01); F17C 2270/0518 (2013.01); H01L 21/67017 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method for supplying a fluorine gas-containing gas from supply equipment for supplying the fluorine gas-containing gas to consumption equipment consuming the fluorine gas-containing gas,
the supply equipment including a filled container filled with a first fluorine gas-containing gas, a pipe letting a container valve of the filled container and the consumption equipment communicate with each other, a pressure regulator provided on the pipe and passing the gas from an upstream side to a downstream side while regulating a gas pressure, and a buffer tank connected to a portion on an upstream side relative to the pressure regulator of the pipe,
the method comprising:
performing a sealing step of bringing the pressure regulator into a closed state, and then introducing a second fluorine gas-containing gas having a fluorine gas concentration in a range of ±10% of a fluorine gas concentration of the first fluorine gas-containing gas into a portion between the container valve and the pressure regulator of the pipe such that a pressure is lower than the gas pressure in the filled container, and
after the sealing step, in a state where the second fluorine gas-containing gas is sealed in the portion between the container valve and the pressure regulator of the pipe and after the buffer tank is brought into an opened state, introducing the first fluorine gas-containing gas from the filled container into the portion between the container valve and the pressure regulator of the pipe, sending the second fluorine gas-containing gas sealed in the portion between the container valve and the pressure regulator of the pipe to the buffer tank, and then supplying the first fluorine gas-containing gas introduced into the portion between the container valve and the pressure regulator of the pipe to the consumption equipment.