US 12,031,208 B2
Atomic layer deposition apparatus for powders
Jing-Cheng Lin, Hsinchu County (TW); Jung-Hua Chang, Hsinchu County (TW); and Chia-Cheng Ku, Hsinchu County (TW)
Assigned to SKY TECH INC., Hsinchu County (TW)
Filed by SKY TECH INC., Hsinchu County (TW)
Filed on May 30, 2021, as Appl. No. 17/334,771.
Claims priority of application No. 109134657 (TW), filed on Oct. 6, 2020.
Prior Publication US 2022/0106682 A1, Apr. 7, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C23C 16/44 (2006.01); C23C 16/455 (2006.01)
CPC C23C 16/4417 (2013.01) [C23C 16/4412 (2013.01); C23C 16/45544 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An atomic layer deposition apparatus for powders, comprising:
a vacuum chamber, comprising a reaction space for accommodating a plurality of powders;
a shaft sealing device, comprising an outer tube and an inner tube, wherein the outer tube comprises an accommodating space for accommodating the inner tube, the inner tube comprises a connection space, and the inner tube extends from the accommodating space of the outer tube into the reaction space of the vacuum chamber and forming a protruding tube part;
a driving unit, mechanically connected to the vacuum chamber through the outer tube, for driving the vacuum chamber to rotate through the outer tube and the driving unit is not connected to the inner tube; wherein when the driving unit drives the outer tube and the vacuum chamber to rotate, the inner tube does not rotate with the outer tube and the vacuum chamber;
at least one air extraction line, disposed in the connection space of the inner tube and fluidly connected to the reaction space of the vacuum chamber, for extracting a gas from the reaction space; and
at least one air intake line, disposed in the connection space of the inner tube and fluidly connected to the reaction space of the vacuum chamber, for transporting a precursor or a non-reactive gas to the reaction space, wherein the non-reactive gas blows the powders around in the reaction space;
wherein the reaction space comprises a first length, the protruding tube part comprises a second length, a direction of the first length of the reaction space and the second length of the protruding tube part is in parallel with a rotating axis of the vacuum chamber.