US 12,031,015 B2
Quaternary ammonium-based surface modified silica, compositions, methods of making, and methods of use thereof
Anthony Y. Kim, Tualatin, OR (US); and Shogo Onishi, Tigard, OR (US)
Assigned to FUJIMI INCORPORATED, Aichi (JP)
Filed by FUJIMI INCORPORATED, Aichi (JP)
Filed on Mar. 29, 2022, as Appl. No. 17/706,800.
Claims priority of provisional application 63/168,789, filed on Mar. 31, 2021.
Prior Publication US 2022/0325076 A1, Oct. 13, 2022
Int. Cl. C09G 1/02 (2006.01); C08K 9/04 (2006.01); H01L 21/306 (2006.01)
CPC C08K 9/04 (2013.01) [C09G 1/02 (2013.01); H01L 21/30625 (2013.01)] 15 Claims
 
1. A surface modified silica comprising silica and a quaternary ammonium-based polymer, wherein the quaternary ammonium-based polymer is represented by a compound of Formula (I):

OG Complex Work Unit Chemistry
wherein
R1 is selected from substituted or unsubstituted C1-C8 alkylene, substituted or unsubstituted arylene, substituted heteroarylene, and substituted cycloalkylene,
R2 is selected from substituted or unsubstituted C1-C8 alkylene, substituted or unsubstituted arylene, substituted heteroarylene, and substituted cycloalkylene,
R3 is a substituted or unsubstituted oxyalkylene,
R4 is, in each instance, a substituted or unsubstituted C1-C8 alkyl,
X is, in each instance, a counterion,
m is an integer between 1 and 20,000, and
n is an integer between 1 and 10,000;
wherein the surface modified silica has an N+/N− value greater than about 3,000.