US 12,030,819 B2
Doped SiC and SiOC compositions and Methods
Douglas M. Dukes, Troy, NY (US); Ashish P. Diwanji, New Albany, OH (US); Andrew R. Hopkins, Sylvania, OH (US); Walter J. Sherwood, Glenville, NY (US); Glenn Sandgren, Ambler, PA (US); Mark S. Land, Houston, TX (US); and Brian L. Benac, Hadley, NY (US)
Assigned to Pallidus, Inc., Albany, NY (US)
Filed by Pallidus, Inc., Albany, NY (US)
Filed on Jul. 4, 2021, as Appl. No. 17/367,380.
Application 16/442,915 is a division of application No. 15/924,141, filed on Mar. 16, 2018, granted, now 10,322,974, issued on Jun. 18, 2019.
Application 15/924,141 is a division of application No. 14/864,498, filed on Sep. 24, 2015, granted, now 9,919,972, issued on Mar. 20, 2018.
Application 17/367,380 is a continuation of application No. 16/442,915, filed on Jun. 17, 2019, granted, now 11,053,167.
Application 14/864,498 is a continuation in part of application No. 14/634,814, filed on Feb. 28, 2015, granted, now 10,167,366, issued on Jan. 1, 2019.
Application 14/864,498 is a continuation in part of application No. 14/268,150, filed on May 2, 2014, granted, now 9,815,943, issued on Nov. 14, 2017.
Application 14/864,498 is a continuation in part of application No. 14/212,896, filed on Mar. 14, 2014, granted, now 9,815,952, issued on Nov. 14, 2017.
Claims priority of provisional application 62/112,025, filed on Feb. 4, 2015.
Claims priority of provisional application 62/055,461, filed on Sep. 25, 2014.
Claims priority of provisional application 62/055,497, filed on Sep. 25, 2014.
Claims priority of provisional application 62/055,397, filed on Sep. 25, 2014.
Claims priority of provisional application 61/946,598, filed on Feb. 28, 2014.
Claims priority of provisional application 61/818,981, filed on May 3, 2013.
Prior Publication US 2022/0002207 A1, Jan. 6, 2022
Int. Cl. C01B 32/956 (2017.01); C01B 32/977 (2017.01); C04B 35/515 (2006.01); C04B 35/56 (2006.01); C04B 35/571 (2006.01); C04B 35/80 (2006.01); C08G 77/20 (2006.01); C08G 77/50 (2006.01); C08L 83/00 (2006.01); C08L 83/04 (2006.01); C08G 77/00 (2006.01); C08G 77/12 (2006.01)
CPC C04B 35/571 (2013.01) [C01B 32/956 (2017.08); C01B 32/977 (2017.08); C04B 35/515 (2013.01); C04B 35/56 (2013.01); C04B 35/5603 (2013.01); C04B 35/80 (2013.01); C08G 77/20 (2013.01); C08G 77/50 (2013.01); C08L 83/00 (2013.01); C08L 83/04 (2013.01); C04B 2235/3418 (2013.01); C04B 2235/3826 (2013.01); C04B 2235/44 (2013.01); C04B 2235/48 (2013.01); C04B 2235/483 (2013.01); C04B 2235/528 (2013.01); C04B 2235/5427 (2013.01); C04B 2235/5436 (2013.01); C04B 2235/5445 (2013.01); C04B 2235/6581 (2013.01); C04B 2235/72 (2013.01); C04B 2235/721 (2013.01); C04B 2235/727 (2013.01); C04B 2235/77 (2013.01); C04B 2235/785 (2013.01); C04B 2235/94 (2013.01); C04B 2235/96 (2013.01); C08G 77/12 (2013.01); C08G 77/80 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A filled silicon carbide composition comprising:
a. polymer derived SiC particles;
b. wherein the particles consist essentially of a ceramic having a filler bound into the ceramic;
c. wherein the filler is selected to provide a predetermined property to a silicon carbide wafer and wherein the filler comprises a dopant;
d. wherein the particles have less than 0.001% impurities; and
e. wherein the predetermined property is a p-type feature.