US 12,030,775 B2
Apparatus for supplying gas including an ion chamber and a gas supply unit connected to the ion chamber
Sang Jin Lee, Suwon-si (KR); Young Kwon Kim, Hwaseong-si (KR); Ungi Bak, Suwon-si (KR); Jonghyun Lee, Seoul (KR); and Ui Yong Jung, Hwaseong-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Mar. 22, 2021, as Appl. No. 17/208,331.
Claims priority of application No. 10-2020-0086129 (KR), filed on Jul. 13, 2020.
Prior Publication US 2022/0010932 A1, Jan. 13, 2022
Int. Cl. C01B 3/06 (2006.01); H01M 8/04082 (2016.01); H01M 8/0432 (2016.01)
CPC C01B 3/065 (2013.01) [B01J 2219/00164 (2013.01); C01B 2203/066 (2013.01); C01B 2203/16 (2013.01); H01M 8/04216 (2013.01); H01M 8/04373 (2013.01); Y02E 60/32 (2013.01); Y02E 60/36 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An apparatus for supplying gas, comprising:
an ion chamber; and
a gas supply unit connected to the ion chamber,
wherein the gas supply unit comprises:
a case;
an inactive gas supply unit connected to the ion chamber; and
a hydrogen gas supply unit installed inside or outside of the case,
wherein the hydrogen gas supply unit comprises:
a hydrogen gas generator configured to generate hydrogen gas;
a controller connected to the hydrogen gas generator;
a dehumidifying filter connected to the controller and configured to remove moisture from the hydrogen gas; and
a purifying filter connected to the dehumidifying filter and configured to remove an impurity from the hydrogen gas,
wherein the hydrogen gas generator is configured to generate the hydrogen gas through a chemical reaction between a reactant and a hydrogen-containing solid raw material,
wherein a hydrogen supply pipe is connected to the hydrogen gas supply unit, and a first bypass flow path is connected to two different portions of the hydrogen supply pipe,
wherein the controller comprises:
a body having an inlet through which the hydrogen gas flows in and an outlet through which the hydrogen gas flows out of;
a piston installed in the body and configured to move;
a spring connected to the piston; and
a screw connected to a support board disposed at a first end of the spring,
wherein the spring has a second end that is supported by the piston.